Product Model
FSM-X-AF005
Selling Points
- 15 ms response time ensures quick and accurate flow rate detection.
- 2Measures flow in both directions, perfect for suction confirmation.
- 3Analog output with non-linear characteristics improves resolution in low flow rates.
- 4Reduced volume by 52% compared to conventional products, weighing only 4 g.
- 5Suitable for semiconductor manufacturing processes and other industrial applications requiring precise gas flow control.
Technical Specifications
Detailed engineering parameters based on manufacturer documentation
| Parameter | Value | Parameter | Value |
|---|---|---|---|
Type | FSM-X | Output type | A : Analog output |
Flow direction | F : Uni-direction | Flow rate range | 005 : Full scale : 0.5 l/min |
Fitting | Blank : Single sensor head (without fitting) | Cable | Blank : Without cable |
Specifications may be subject to change without notice