Product Model
VSC-E10-6A6J

Selling Points
- 1High-vacuum performance with a vacuum level of -27.6 in. Hg (-92 kPa) and suction flow rates up to 6.30 SCFM (180 r/x ANR).
- 2Compact and lightweight design, ideal for restricted mounting spaces.
- 3Direct acting valve for high-speed and stable response, ensuring quick ON/OFF switching.
- 4Available in various nozzle diameters (φ4a to φ12a) and thread sizes (M5 to M10A) for versatile applications.
- 5Suitable for semiconductor manufacturing processes and other high-precision industries.
Technical Specifications
Detailed engineering parameters based on manufacturer documentation
Parameter | Value | Parameter | Value |
---|---|---|---|
Model no. | VSC-E10-6A6J | M | -mm |
A | 8mm | D | -mm |
D1 | 6mm | D2 | 8mm |
R | R1/8mm | L1 | 28mm |
L2 | 24mm | L3 | 16mm |
P | 16mm | P1 | -mm |
P2 | -mm | B | 64.7mm |
E | 24.5mm | E1 | -mm |
E2 | -mm | C | -mm |
C1 | 17mm | C2 | 18.2mm |
Opposite side | -mm | F | 16mm |
Nozzle diameter | 1mm | Ultimate vacuum | 92kPa |
Suction flow | 21l/min | Air consumption | 34l/min |
Weight | 36.5g |
Specifications may be subject to change without notice